XLS, High Vacuum Angle Valve, Electromagnetic Type, Bellows Balance

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

Particulates are reduced because there are no sliding metal parts
Pressure balance mechanism allows unrestricted exhaust direction
Can be used in portable equipment since air for drive is not required
A control power supply circuit for solenoid valve drive has been made standard

XLS, High Vacuum Angle Valve, Electromagnetic Type, Bellows Balance

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XLS, High Vacuum Angle Valve, Electromagnetic Type, Bellows Balance

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