XGT*, High Vacuum Slit Valve

Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.

Long service life: 3 million cycles (within standard temperture range)
Low particle generation: reduced by 1/5 or more (compared with the current product)
Easier maintenance
Easy replacement of bellows
Gate can be replaced from above (Made to order)
Safety measures
A mechanical end lock mechanism has been adopted

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Type
Valve Size
Valve Type
Opening Window Size
Gate O-ring Material
Auto Switch & Connector
End Lock
	Options in: Gray are not compatible with other selected option value. Red conflict with another selected option value. Amber are not recommended.

XGT*, High Vacuum Slit Valve

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