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SRF, Clean Regulator

The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin material is used in the fluid contact area. The fluid contact area is washed with freon ultra sonic and DI water.

  • Clean regulator series
  • One piece structure w/LQ fitting
  • Tube porting available
  • Tube sizes (inch): 1/4, 3/8
  • Tube sizes (mm): 6, 8, 10
SRF, Clean Regulator
Configuration Options
  Part Number is Partial
 
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Product Options

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Select values from the drop down lists or make appropriate selections to configure the part number.
Body Size Configuration Status
Type Configuration Status
Tube Size Configuration Status
Pilot Port Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.
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